PHI Genesis

The PHI GENESIS represents a new standard in surface analysis, offering unprecedented automation, multi-technique capabilities, and high-performance XPS and HAXPES analysis.

 

Key features:

  • Ease of operation: Set up routine and advanced multi-technique acquisitions easily, all within one intuitive screen.
  • Multi-Technique options: Wide range of options that can meet all surface analysis needs.
  • Precise location analysis: Navigate with confidence using sub-5μm X-ray-induced SXI images.
  • High – Throughput analysis: Fully Automated Parking positions and sample holders up to 80x80mm.
  • Depth Profiling: High-speed, non-destructive depth profiling with multiple ion guns converging on a single point.
  • Confocal dual scanning X-ray source: XPS and HAXPES analysis from the same spot.
  • Dual-beam charge neutralization: Enables XPS and AES analysis on insulating samples.

Product Specifications

GENESIS

Optional Accessories

  • HAXPES (Cr)
  • UPS
  • LEIPS
  • AES
  • REELS
  • Dual anode X-ray sources (Mg/Mg, Mg/Al, Mg/Zr)
  • Dual source ion gun for Ar Monatomic and Ar Cluster ion beam
  • Ar-GCIB cluster size measurement tool
  • 20 kV C60 cluster ion gun
  • Narrow acceptance angle aperture
  • Sample heating and cooling
  • 4-contact voltage application
  • Transfer vessel
  • Dedicated intro pumping
  • High magnification sample observation microscope (live view)
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