nanoTOF 3+

The PHI nanoTOF 3+ is an advanced multifunctional Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) instrument capable of achieving precise surface mass analysis in microscale areas - all within a single system.

 

Key features:

  • Triple focusing electrostatic analyzer: Achieving high mass resolution, high sensitivity, and reduced shadows on uneven surfaces
  • Advanced Ion Beam Technology: Produces high spatial resolution mode at <50 nm
  • Automated unattended analysis: Auto sample bias adjustment enables unattended measurements, even on insulating samples
  • High-Throughput analysis: Automated sample transfer system with built in parking
  • Dual-beam charge neutralization (option): Easily neutralizes surface charge of insulating sample
  • Cross section analysis (option): FIB processing to cross-sectional TOF-SIMS imaging with a single ion gun
  • Parallel Imaging MS/MS (option): Provides simpler information of molecular structure, such as terminal groups, linear chains, double bonds
  • Remote access: Fully control the instrument remotely, once the sample is loaded into system

Product Specifications

nanoTOF3-no-desk-untrimmed

Optional Accessories:

  • Hot/Cold Sample Stage Module
  • Transfer Vessel for air-sensitive sample
  • Inert gas Glove Box for preparation of sensitive samples
  • Parallel Imaging MS/MS
  • Ar Gas Cluster Ion Beam (GCIB) for low-damage depth profiling
  • C60 Ion Gun
  • Cs Ion Gun
  • Ar/O2 Gas Gun for rapid depth profiling of inorganic materials
  • Focused Ion Beam (FIB) Gun with FIB Software
  • Off-line Data Reduction Software
  • Static SIMS Library
Contact Us