The PHI 710 is a high-performance Auger Electron Spectroscopy (AES) instrument that provides elemental and chemical state information from sample surfaces, nano-scale features, thin films, and interfaces - with exceptional spatial resolution and stability.
Key features:
- Exceptional spatial resolution: Nano-scale Auger analysis at 500,000x magnification and higher
- Coaxial optics geometry: Provides a complete and unobstructed visualization of microstructures
- High energy resolution: As low as 0.1% for detailed chemical state analysis and mapping
- Nanoscale thin film analysis: Floating column ion gun provides depth profiling for ultra-thin films (<5 nm) and thicker structures
- Insulator analysis: Low-energy floating column ion gun enables effective analysis of insulating materials
- Specialized Solutions for In-Situ Characterization: Multiple optional add-ons for specialized experiments
- Acoustic enclosure: Minimizes vibration, sound, and temperature drift - ensuring stable analysis
